Excimer laser annealing for low-temperature polysilicon thin film transistor fabrication on plastic substrates

Authors: Fortunato G., Pecora A., Maiolo L., Cuscuna M., Simeone D., Minotti A., Mariucci L.
Years: 2007
Source Title: 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors, RTP 2007
Doi: 10.1109/RTP.2007.4383858
Venue: CNR Nanotec @ Lecce