ENHANCEMENT of the AMORPHOUS to MICROCRYSTALLINE PHASE TRANSITION in SILICON FILMS DEPOSITED by SiF4-H2-He PLASMAS

Authors: Cicala G., Losurdo M., Capezzuto P., Bruno G., Ligonzo T., Schiavulli L., Minarini C., Rossi M.C.
Years: 1999
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Doi:
Venue: NanoChem @ URT Bari