Dynamics of low temperature PECVD growth of microcrystalline silicon thin films: Impact of substrate surface treatments

Authors: Losurdo M., Giangregorio M.M., Sacchetti A., Capezzuto P., Bruno G., Carabe J., Gandia J.J., Urbina L.
Years: 2006
Source Title:
Doi: 10.1016/j.jnoncrysol.2005.09.039
Venue: NanoChem @ URT Bari