Doping of microcrystalline Si:H,Cl films in R.F. glow discharge

Authors: Bruno G., Capezzuto P., Cramarossa F., Barbarossa V., Augelli V., Murri R.
Years: 1983
Source Title:
Doi: 10.1016/0022-3093(83)90295-8
Venue: NanoChem @ URT Bari