Deposition of SiOx Films from Hexamethyldisiloxane/Oxygen Radiofrequency Glow Discharges: Process Optimization by Plasma Diagnostics

Authors: Creatore M., Palumbo F., D’Gostino R.
Years: 2002
Source Title:
Doi: 10.1023/A:1019942625607
Venue: NanoChem @ URT Bari