Bending analysis in AlN-based multilayered piezoelectric cantilevers

Authors: Giordano C., Ingrosso I., Grande M., Qualtieri A., Pugliese M., Todaro M.T., Tasco V., De Vittorio M., Passaseo A.
Years: 2009
Source Title: Ferroelectrics
Doi: 10.1080/00150190902987848
Venue: CNR Nanotec @ Lecce