Ar/HMDSO/O2 fed atmospheric pressure DBDs: Thin film deposition and GC-MS investigation of by-products

Authors: Fanelli F., Lovascio S., D’Agostino R., Arefi-Khonsari F., Fracassi F.
Years: 2010
Source Title:
Doi: 10.1002/ppap.200900159
Venue: NanoChem @ URT Bari