An optical study of the correlation between growth kinetics and microstructure of μc-Si grown by SiH4-H2 PECVD

Authors: Giangregorio M.M., Losurdo M., Sacchetti A., Capezzuto P., Giorgis F., Bruno G.
Years: 2006
Source Title:
Doi: 10.1016/j.apsusc.2006.05.094
Venue: NanoChem @ URT Bari