AlN on polysilicon piezoelectric cantilevers for sensors/actuators

Authors: Giordano C., Ingrosso I., Todaro M.T., Maruccio G., De Guido S., Cingolani R., Passaseo A., De Vittorio M.
Years: 2009
Source Title: Microelectronic Engineering
Doi: 10.1016/j.mee.2008.12.075
Venue: CNR Nanotec @ Lecce