AlN-based MEMS devices for vibrational energy harvesting applications

Authors: Bertacchini A., Scorcioni S., Dondi D., Larcher L., Pavan P., Todaro M.T., Campa A., Caretto G., Petroni S., Passaseo A., De Vittorio M.
Years: 2011
Source Title: European Solid-State Device Research Conference
Doi: 10.1109/ESSDERC.2011.6044220
Venue: CNR Nanotec @ Lecce